Molybdenum target rotating

A molybdenum rotary target is a magnetically controlled target, usually in the shape of a cylinder, containing a stationary magnet that rotates at a slow speed during operation. Common product specifications are as follows: ID-133/ OD-157x 3191mm; ID - 133 / OD - 157 X 3855 mm; X1800mm/OD ID - 160-180. Xiamen ZHONGTUNGSTEN Online Technology Co., LTD. Provides A VARIETY OF conventional size of molybdenum rotary target, can also be processed according to the specific requirements of customers.

It has good performance requirements, such as the use of molybdenum rotary target temperature is 1800°C, the highest use temperature is 2310°C, density is 19.2 grams/cubic centimeters, purity is 99.95%, so it is often used in the preparation of solar cells, building glass, automotive glass, semiconductor, flat screen TV, etc.

Molybdenum rotary target is a method to improve the utilization rate of molybdenum sputtering target. Compared with molybdenum plane target, the design of molybdenum rotating target structure shows substantial advantages of molybdenum sputtering target. The lifetime of the target is defined as the sputtering power multiplied by the sputtering time, or the total thickness of the material that can be deposited on the substrate. The change of geometric structure and design from the molybdenum plane target to the molybdenum rotating target increases the utilization rate of the target, and the utilization rate can be increased from 30% ~ 50% of the molybdenum plane target to the molybdenum rotating target > 80%. In addition, if the life of the target material is measured by the sputtering power multiplied by the sputtering time, the life of the rotating molybdenum target is 5 times longer than that of the planar molybdenum target. Because the rotating target rotates continuously during sputtering, heavy deposition will not occur on its surface.