Tungsten Ion Implantation Consumable Parts

1. Product name: Tungsten Ion Implantation Consumable Parts

Tungsten material for ion implanter is mainly used to prepare parts of ion source of ion implanter. It is a tungsten material made of high-purity tungsten metal powder as raw material, which is made by powder metallurgy and then rolled or forged. It has the advantages of high density, high hardness, extremely low vapor pressure, and excellent high temperature strength.

2.  Determination of chemical composition

The requirements for impurity elements in the ion implantation process are very strict, and the excess of the impurity elements may lead to contamination and failure of the ion implantation material. Combined with the adverse effects of various impurity elements and the technical requirements of domestic and foreign customers, the chemical composition of tungsten materials for ion implanters is specified. The specific requirements are as follows:

 Note: The main component content is obtained by subtracting the sum of the measured values of impurity elements: (excluding the four elements of C, H, 0, N) from 100%.

2. Density determination of tungsten ion implantation consumable parts

Tungsten material for ion implanter is mainly used to process the parts of the ion source part of the ion implanter, and these parts will be bombarded or eroded by electrons during use.

When the density of the tungsten material is low, it will inevitably affect the service life of the parts: theoretically, the higher the density of the tungsten material, the better the service life. However, if the density of the tungsten material is too high, it is necessary to increase the tungsten plate or The total deformation of the tungsten rod will affect the yield and production cost of the tungsten material. According to the process test, when the total deformation of the general tungsten plate or tungsten rod is more than 70%, the density can reach 19.10g/cm3. We provide tungsten materials that meet this density requirement for customers to try out, and customer feedback can meet the design of parts for ion implanters life.

Therefore, combined with the production process characteristics of tungsten plates and tungsten rods, generally thin tungsten plates and tungsten rods with smaller diameters have a larger amount of thermal deformation, and the corresponding density is slightly higher: combined with the client's technical requirements and According to the actual level of the industry, the density of tungsten materials used in ion implanters should meet the following requirements:

Density requirements for tungsten plates used in ion implanters

 Density requirements of tungsten rods for ion implanters

3. Determination of hardness of tungsten ion implantation consumable parts

The tungsten material used in the ion implantation machine needs to be processed into corresponding parts later. The hardness of the tungsten material will directly affect the tool loss in the subsequent machining process. Therefore, the hardness needs to be controlled within a certain range, so that the tungsten material will have excellent machinability. , At this time, the wear of the tool will be relatively light, which is beneficial to improve the service life of the tool and reduce the production cost.

4. Our company and factory

Magotan is mainly engaged in the R&D and production of rods, rods, wires, and deep-processed products of refractory metals such as tungsten and molybdenum, focusing on the development of new tungsten and molybdenum products and the development of new application fields As the core, with technological progress and technological innovation as means, standardize enterprise management, improve enterprise system, and create an "international, leading and professional tungsten and molybdenum product enterprise" with the enterprise spirit of "unity, struggle, innovation, and efficiency".

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