Tungsten Ion Implantation Components
The tungsten material used in the ion implantation machine needs to be processed into corresponding parts later. The hardness of the tungsten material will directly affect the tool loss in the subsequent machining process. Therefore, the hardness needs to be controlled within a certain range, so that the tungsten material will have excellent machinability. At this time, the wear of the tool will be relatively light, which is beneficial to improve the service life of the tool and reduce the production cost.
Product Introduction
Table 1 takes the tungsten rod as an example, and compares the wear of the tool when turning tungsten rods with different hardnesses. It can be seen from Table 1 that in the same turning test, with the increase of the hardness of the tungsten rod, the wear of the tool also increases significantly. Therefore, under the premise of ensuring the density, the hardness of the tungsten material should be controlled through a suitable production process, so that the subsequent processing of the tungsten material will be very necessary.
Table 1 Turning test of tungsten rods with different hardness
Tungsten rod hardnessHV30 | 460 | 426 | 396 |
knife damage pictures |
|
|
|
Tool loss value/μm | 0.042 | 0.019 | 0. 009 |
Test Conditions | ①Tungsten rod: diameter φ 15.8mm, polished surface; ②Tool: Special insert for tungsten rod turning; ③Notes: Use the same equipment, the same operator， and the same process parameters to carry out. | ||
Therefore, combined with the hardness characteristics of the tungsten plate and the tungsten rod, and about the technical requirements of the client and the actual level of the industry, the hardness of the tungsten material for ion implanters is specified, and the following requirements must be met:
Table 2 Hardness requirements of tungsten plate for ion implanter
Thickness/mm | Density/HV30 |
>1~10 | > 330~480 |
> 10~26 | > 330~460 |
Table 3 Hardness requirements of tungsten rod for ion implantation machine
Diameter /mm | Density/HV30 |
>1~10 | > 350-500 |
> 10~26 | > 350-480 |
Hot Tags: tungsten ion implantation components, China, suppliers, manufacturers, factory, buy, price, discount, in stock, made in China
You Might Also Like
Send Inquiry
