Product Introduction
1. Features
Most of the Tungsten Consumable Parts provided by our company are processed from tungsten and tungsten lanthanum raw materials, because tungsten has a high melting point, excellent creep resistance, excellent corrosion resistance, good electrical and thermal conductivity, excellent purity.
2. Application
Therefore, Tungsten Consumable Parts have become the pillar products of our company, mainly used in ion implanters. Most of the Tungsten Consumable Parts are sold to Varian, Axcelis or Applied Materials implanter users in Japan, South Korea, Europe and the United States and regions.
3. Tungsten Consumable Parts
Tungsten Consumable Parts may also be referred to as cathodes, chambers, filaments, supports, insulators, and the like, depending on the application. In addition, we also provide ceramic ion implantation parts, ion implantation is an important process in semiconductor production. Implant systems dope the wafer with foreign atoms to change material properties, such as conductivity or crystal structure. The beam path is the center of the implanter system. Here, ions are generated at very high velocities, concentrated, greatly accelerated and focused on the wafer. Components and spare parts made from refractory metals help ensure that the process is as efficient, precise and free of impurities as possible.
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