Crucible Liners For Electron Beam Evaporators
Several structural forms of the electron beam heating evaporation source:
① Evaporator is heated by the linear cathode and electrostatic focusing.
② Evaporator heated by the annular cathode and electrostatic focusing method.
③ Evaporator heated by axial gun and electrostatic far-focusing method.
④ Evaporator heated by axial gun, magnetic focusing, and magnetic deflection 90 degrees.
⑤ E-type electron gun evaporator, the electron trajectory emitted by e-type electron beam evaporation source is similar to the word "e", so it is referred to as e-type gun.
Product Introduction
1. Product name: Crucible liners for electron beam evaporators
Electron Beam Evaporation is different from the traditional evaporation method, electron beam evaporation can accurately bombard the target material in the crucible liners for electron beam evaporators with high-energy electrons with the cooperation of the electromagnetic field so that it can be melted and deposited on the substrate. Crucible liners for electron beam evaporators can deposit high-purity and high-precision thin films.
2. Evaporation principle of crucible liners for electron beam evaporators
Electron beam evaporation is the use of accelerated electrons to bombard the coating material, and the kinetic energy of the electrons is converted into thermal energy to heat and evaporate the coating material and form a film. The electron gun is divided into direct type, ring type, and E type. The characteristics of electron beam heating evaporation are energy Obtain extremely high energy density, up to 109w/cm2, heating temperature up to 3000 ~ 6000 ℃, can evaporate refractory metals or compounds; the evaporated material is placed in water-cooled crucible liners for electron beam evaporators, which can avoid the contamination of the crucible material, and the preparation of high Pure thin film; in addition, due to the small heating area of the vapor, the heat radiation loss is reduced, and the thermal efficiency is high. However, the structure is more complex, and for many compounds, due to the bombardment of electrons, it may be decomposed, so it is not suitable for the evaporation of most compounds.
3. Effect of crucible liners for electron beam evaporators
Crucible liner for electron beam evaporators is often used to prepare Al, Co, Ni, Fe alloy or oxide films, SiO2, ZrO2 films, anti-corrosion, and high-temperature resistant oxide films.
4. Comparison of pros and cons
The biggest advantage of electron beam evaporation and the use of resistance for evaporation is that it can provide higher heat for the material to be evaporated, so the evaporation rate is also faster; the electron beam positioning is accurate, which can avoid evaporation and contamination of the of crucible liners for electron beam evaporators. However, due to the need for continuous water cooling during the evaporation process, the utilization rate of energy is not high; and the secondary electrons that may be brought by high-energy electrons may ionize the residual gas molecules, and may also cause pollution. In addition, most compound film Decomposition occurs when bombarded by high-energy electrons, which affects the composition and structure of the film.
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