Tungsten Sputtering Target

The quality of tungsten sputtering target will directly affect the properties of thin film materials, so it needs to meet the following requirements:

1. High purity; The higher the purity of tungsten sputtering target material, the stronger the corrosion resistance, the better the electrical and optical properties. Under normal circumstances, display and semiconductor devices on the purity of sputtering target material requirements are more strict, for example, tungsten target used for magnetic film purity is generally required to be higher than 99.9%.

2. High density: greater than or equal to 19.1g/cm³;

3. The grain size should be small; Normally, the magnitude of the grain is μm-㎜, for the target of the same composition, the sputtering rate of the target of fine grain size is faster than that of the coarse grain.

4. The impurity content should be low; The cathode in sputtering is acted by the target, and the main pollution sources of sputtering target are water, oxygen and impurities in solids in the pores. The lower the impurity content, the higher the purity.

(1) Decorative coating

In the decorative workpiece (electric case, mobile case, watch strap, necklace, ring, earrings, etc.) coating can improve its corrosion resistance, wear resistance and high temperature resistance, prolong the service life of the product, but also play a beautification role.

At present, the target materials commonly used to decorate the coating are W, Ti, Ni, Al, Cr and stainless steel, etc., after N2, O2 and other gases, can form a variety of colors, such as bronze, silver white, golden yellow, rose and gray black.

(2) Coating of mold

Coating tools (drill bits, tool heads, etc.) or precision molds (precision parts, powder metallurgy molds, etc.)

Now commonly used for die coating target materials are W, Ti, TiN, TiC, CrN, Ti-Al alloy and other superhard metals.

(3) solar cell coating

Tungsten sputtering target used in solar cell coating can improve the optical properties of solar cells.

Solar cell is a kind of photoelectric semiconductor sheet, which can directly use the energy released by the sun to generate electricity, and can output voltage at the moment of being illuminated.

According to the different classification, coating materials are also different, commonly used solar cell coating materials are W, Si, Ti, Mo, Al, Ag, Cr, Cu, ZnO, etc.

(4) glass coating, etc

The glass materials that need coating are construction glass, automobile glass and optical glass, etc. The application of target material in glass is mainly to make low-radiation coated glass (also known as energy-saving glass), that is, to use the principle of magnetron sputtering to sputter multilayer films on glass, in order to achieve energy saving, light control, decoration.

(5) Petroleum, chemical and electronic information industry (semiconductor integrated circuit, information memory, electronic control, etc.) and other fields

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