Molybdenum Components For Ion Implant Equipment

Magotan Metal produces molybdenum components for ion implant equipment, tungsten ion implantation parts. Tungsten, molybdenum and its alloys have good thermal conductivity, electrical conductivity, low thermal expansion coefficient, high temperature strength, low vapor pressure and other characteristics, and become important materials for electronic equipment manufacturing, metal material processing industry, glass manufacturing, high temperature furnace structural components manufacturing, aerospace and industrial applications.

Temperatures up to 1400°C, strong electromagnetic fields, aggressive process gases, and high mechanical forces are a problem for regular materials. Not so with our products. Our heat-resistant components made from molybdenum, tungsten, graphite, or ceramics offer the ideal combination of corrosion resistance, material strength, good thermal conductivity, and absolute purity. One hundred or more Magotan Metals components are used per beam path. They ensure that the ions are generated efficiently and are focused precisely on the wafer in the beam path without any impurities.

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