Tungsten Beamline Components

Due to the working temperature above 2000℃ when the ion source is converted into plasma ion during ion implantation, the ion beam eruption will also produce a lot of ionic kinetic energy, and the general metal will melt quickly. Therefore, relatively heavy and dense inert metals are needed to maintain the direction of the ion beam and increase the component durability. Tungsten material has the advantages of stable high-temperature chemical performance, small thermal denaturation and long service life, etc., which has become the first choice of ion source and consumables for ion injectors in the semiconductor industry. Shielding cylinder of emission cathode, emission panel, center fixed rod, indoor arc starter wire plate and so on are all referred to as tungsten ion implantation parts.

Tungsten Consumable Parts may also be referred to as cathodes, chambers, filaments, supports, insulators, and the like, depending on the application. In addition, we also provide ceramic ion implantation parts, ion implantation is an important process in semiconductor production. Implant systems dope the wafer with foreign atoms to change material properties, such as conductivity or crystal structure. The beam path is the center of the implanter system. Here, ions are generated at very high velocities, concentrated, greatly accelerated and focused on the wafer. Components and spare parts made from refractory metals help ensure that the process is as efficient, precise and free of impurities as possible.

1. Increased hardness: Tungsten and molybdenum ions are known for enhancing the hardness and wear resistance of the injected parts, thus increasing their durability and lifespan.

2. Corrosion resistance: The injection of tungsten and molybdenum ions creates a protective layer on the surface of the injected parts, which makes them resistant to chemical and environmental corrosion.

3. Improved lubrication: Tungsten and molybdenum ions have self-lubricating properties, which reduce friction and wear on the injected parts, resulting in improved performance.

4. Enhanced appearance: Injected parts with tungsten and molybdenum ions have a smooth and polished surface, giving them an aesthetic value that enhances their overall appearance.

5. Reduced friction: With the increased hardness and lubrication properties, there is a significant reduction in friction between the injected parts, which improves their functioning.

6. Cost-effective: The injection of tungsten and molybdenum ions is a cost-effective method of enhancing the performance and lifespan of machine parts compared to the replacement of the entire part.

7. Wide application: The use of tungsten and molybdenum ions in injection technology is not limited to a specific industry or application, making it a versatile and flexible solution.

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