Tungsten Ion Implantation Parts

Due to the working temperature above 2000℃ when the ion source is converted into plasma ion during ion implantation, the ion beam eruption will also produce a lot of ionic kinetic energy, and the general metal will melt quickly. Therefore, relatively heavy and dense inert metals are needed to maintain the direction of the ion beam and increase the component durability. Tungsten material has the advantages of stable high-temperature chemical performance, small thermal denaturation and long service life, etc., which has become the first choice of ion source and consumables for ion injectors in the semiconductor industry. Shielding cylinder of emission cathode, emission panel, center fixed rod, indoor arc starter wire plate and so on are all referred to as tungsten ion implantation parts.

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